Microtechnological Foundations 33
3.2 Preparation of Thin Layers 37 3.2.1 Condition and Preprocessing of the Substrate Surface 37 3.2.2 Layer Deposition from the Gas Phase 39 3.2.5 Chemical Vapor Deposition 46 3.2.7 Deposition by Spinning Spin Coating 50 3.2.8 Shadow-mask Deposition Techniques 53 3.3 Preparation of Ultrathin Inorganic Layers and Surface-bound Nanoparticles 54 3.3.1 Ultrathin Layers by Vacuum Deposition Processes 54 3.3.2 Deposition of Ultrathin Films from the Liquid Phase 55 3.3.3 In Situ Generation of...
Size Reduction by Sidewall Transfer
The line width of lithographic features can be drastically reduced if side wall depositions at perpendicularly etched micro- or nanostructures are used as masks in subsequent anisotropic etching or deposition processes. This technique transfers the side-wall topology rather than the original structure to the substrate. It is therefore named sidewall transfer lithography STL . The application of STL to silicon leads to the formation of sub-10-nm structures. The process involves the deposition of...
Insight into the Nanoworld
The realization that there are small things in the world that are not visible to the naked eye extends back into human history. The development of the natural sciences created an interest in the microworld, in order to enable a better understanding of the world and the processes therein. Therefore, the development of new microscopic imaging methods represents certain milestones in the natural sciences. The microworld was approached by extending the range available for the direct visualization...
Nanoswitches Molecular Switches and Logic Elements
Switching processes can be supported by electronic, mechanical or material changes. When approaching the dimensions of single molecules, the borders between these three principles disappear. Molecular movements are linked to electronic processes, and on the other hand, electronic transfers lead to, at least temporarily, changes in the chemical structure. Nanomechanical and nanoelectronic systems with free-standing functional structures can be realized by a combination of FIB and CVD...
Functional Characterization of Nanostructures
The functional characterization is seriously hampered by scaling down to the nanometer range, even more than the geometrical details are. The presentation of the required interfaces to a measurement system is even problematic. Moreover, the measurement signal is often too low or the nanoscopic object is significantly influenced by the interactions of the measurement process. So a physical-functional characterization is often limited to a classification of the functional properties of a...
Intervention into the Nanoworld
The scientific understanding of the molecular world and the application of quantitative methods laid the foundations of modern chemistry. Before the quantification of chemical reactions, there was already an applied area of chemistry, for example in mining or metallurgy. However, it was established through an empirical approach. The understanding of the molecular context and its quantitative description, supplemented by the control of reactions by parameters derived from theoretical work or...